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Mass Flow Controller
Offers extended range capability up to 400 SLM, enhanced temperature stability, and a variety of advanced functions.
Product Features
1. Minimum measurable flow: 5 SCCM
2. Compact size
3. Equipped with standard soft-start (buffer) function
4. High gas-tightness
Downloads
Specifications
Model | Product Description: | Flow Range |
MF5111B | Mass flow meter | 5 SCCM ~ 20 SLM |
MF5141B | Mass Flow Controllers (Normally Closed) | |
MF5151B | Mass Flow Controller (Normally Open) | |
MF5112B | Mass flow meter | 30 SCCM ~ 200 SLM |
MF5142B | Mass Flow Controllers (Normally Closed) | |
MF5152B | Mass Flow Controller (Normally Open) | |
MF5113B | Mass flow meter | 400 SLM |
MF5143B | Mass Flow Controllers (Normally Closed) |
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Model：MF5100B
