Mass Flow Controller

Mass Flow Controller

Offers extended range capability up to 20 SLM, improved temperature stability, and multiple advanced features.

Product Features

1. Minimum flow range: 5 SCCM, up to 20 SLM
2. Compact size
3. Standard soft-start function
4. Minimum leakage rate: 1.013 × 10⁻¹⁰ Pa·m³/s (He)

Downloads

Specifications

Display subtitles

Size

8 inches

10.4 inches

12.1 inches

Enter the project

Incoming force signal

Thermocouple [ T-type x 4 ]

Sampling cycle

1 second (4 points/1 cycle)

A/D transformations

Double integration method 15bit

Measurement range

-210.0 ~ 320.0°C

Product accuracy

±0.5% FS+1digit

Control the project

Contact force

24 o'clock

Contact output

24 points + 8 points (transistor contact, optional)

Control the output

SSR

Teleportation output

-2VDC ~ +3.2VDC

Display the specification

display

65535 color TFT LCD display

resolution

800x600 (8.0")

800x600(10.4")

800X600 (12.1")

Exterior dimensions

231.5 x 174.5 x 42.5 mm

269.8 x 212.0 x 38.0 mm

315.0 x 241.0 x 54.5mm

Opening size

221.0 x 164.0 mm

258.5 x 200.8 mm

301.5 x 228.0 mm

Other specifications

Operating voltage

Power supply 100~240 VAC

Frequency of use

50~60 Hz

Power consumption

AC100V max 15VA; AC200V max 20VA

Program capacity

There were 120 groups for each trial mode

(2 ZONE: 2 SECTIONS/GROUP; 3 ZONE: 3 SECTIONS; STEP: 20 segments/group; LINK: 6 links/group).

Service life

50000 hours (Type. at 25°C)

environment

0~50°C, below 90%RH (no condensation).

Insulation resistance

500VDC 20MΩ or more between each terminal ~ FG terminal

Insulation withstand voltage

1500VAC between power terminals ~ FG terminals for 1 minute (10mA or less)

Product weight

About 2 kg

Communication features

Comes standard

RS-232CRS-485

Optional equipment

SD card recording module, Ethernet module

  • Model:MF1100B